Introduction of Vacuum high-temperature purification furnace
A Vacuum High-Temperature Purification Furnace is a high-end thermal processing system specifically designed for the purification of ultra-high-purity materials. By performing high-temperature heat treatment under high vacuum (typically ≤1 Pa) and introducing reactive gases—such as chlorine (Cl₂), fluorine (F₂), hydrogen fluoride (HF), or freon/argon mixtures—it effectively removes metallic impurities (e.g., Fe, Ca, Al, Ni, etc.), achieving material purity levels as low as 5 ppm or even below 1 ppm. This equipment is widely used in industries with extremely stringent purity requirements, including semiconductors, new energy (e.g., lithium batteries and photovoltaics), and aerospace.
Working principle of Vacuum high-temperature purification furnace
Vacuum high-temperature purification primarily relies on a synergistic mechanism of "high-temperature physical volatilization + chemical vapor transport":
Loading: Carbon-based or ceramic powders/bulk materials (e.g., graphite, carbon fiber, SiC, BN, etc.) to be purified are loaded into high-purity graphite crucibles.
High-Vacuum Evacuation: The chamber is evacuated to an ultimate vacuum of 10⁻¹–10⁻² Pa to remove oxygen and moisture.
Process Gas Introduction (Optional): Gases such as freon (CFCs), argon (Ar), or chlorine (Cl₂) are introduced. At high temperatures, these generate highly reactive halogen species (Cl, F), which react with metallic impurities to form low-boiling-point metal chlorides or fluorides (e.g., FeCl₃, CaF₂).
High-Temperature Soaking: The material is held at 2000–3000°C for several hours to tens of hours, allowing the volatile impurity compounds to evaporate and be removed by the vacuum system.
Cooling and Unloading: The purified product is cooled under an inert atmosphere before removal, ensuring high purity and preventing recontamination.
Application of Vacuum high-temperature purification furnace
High-purity graphite powders
High-purity graphite components
High-purity fibrous thermal insulation materials
Technical Feature of Vacuum high-temperature purification furnace
Supports a combined purification process integrating high-temperature physical volatilization and chemical methods.
The resistance-heated furnace employs Dingli Tech’s proprietary ultra-high-temperature, high-current electrode feedthrough technology, enabling stable long-term operation at 2600°C.
Multi-zone independent temperature control ensures excellent temperature uniformity in resistance-heated models.
Utilizes specialized high-temperature infrared pyrometry for precise temperature measurement with minimal error.
Induction-heated configuration available, achieving temperatures up to 3000°C, ideal for high-temperature purification processes.
Compatible with various process atmospheres: Vacuum / N₂ / Ar / CH₄ / H₂ / custom process gases.
