Product Features of aluminum nitride sintering furnace
- Wide-range gas flow with excellent atmosphere uniformity;
- Two levels of temperature uniformity (≤±3℃/5℃) for more flexible operation;
- High-efficiency rapid cooling: cooling time ≤8h; ultra-rapid cooling furnace: ≤3h;
- Rich experience in manufacturing aluminum nitride (AlN) vacuum furnaces;
- Fully automated intelligent control with automatic generation of single-furnace operation curve reports;
- Adopts imported carbon felt and graphite heating elements;
- Meets the high-purity requirements of the semiconductor industry.
Technical Parameters of the aluminm nitride sintering furnace
Item Technical Specification
Maximum Temperature 2000℃
Cold-state Vacuum Degree 0.5 Pa (Ultimate vacuum can be customized according to actual production requirements)
Temperature Uniformity ≤±5℃
Leak-up Rate ≤2 Pa/h
Working Atmosphere Vacuum or inert gas protection (micro-positive pressure)
Equipment Models of aluminum nitride sintering furnace:
We can customize the size and functions of the brazing furnace according to your production requirements.
